University of Cambridge Electron Beam Lithography Facility

Submitted by jonathan_griffiths on Mon, 07/22/2019 - 11:59

Facility providing electron-beam lithography services to semiconductor physics, optics and microelectronics research groups, and to related industrial users. Electron-beam lithography is a well-established means of fabricating the smallest lithographic features required for research and niche production semiconductor and optical technologies. The tools themselves are expensive (>£2m) and require considerable experience to obtain good results, and so are well suited to being providing as a centralised facility in a university setting.

Disciplines

Biological Sciences, Health & Food
Energy
Environment
Physical Sciences & Engineering

 

Back

Contact Us

📧 Public Contact email
ebeam@sp.phy.cam.ac.uk
Telephone Number
1223337274
Host Organisation
Department of Physics, University of Cambridge
🏢 Address

East of England
CB3 0HE
United Kingdom

Last Updated: