SuperFab

Submitted by phil.meeson@rh… on Mon, 11/22/2021 - 21:20

SuperFab is an electronic device nanofabrication facility based at Royal Holloway, University of London in Egham, Surrey. The facility specialises in superconducting and hybrid quantum circuits, especially quantum computing and quantum limited sensing, but also with wider capability. Nanofabrication tools and capabilities available include electron-beam lithography (JEOL JBX8100-FS), Optical lithography (4Pico laserwriter), He/Ne imaging and focussed-ion-beam milling (Zeiss ORION Nanofab), specialist thin film deposition including Josephson junction fabrication (Plassys MEB550), electron-beam deposition, sputtering, wet-etch and reactive ion etch, and an array of characterisation and inspection tools. Tools are housed in a Class 5 particulate controlled, temperature and humidity controlled environment. SuperFab is open for use by academic researchers and for industrial R&D and small-scale production.

Disciplines

Physical Sciences & Engineering
Keywords
superconducting
quantum
nanofabrication
electronic
Josephson

 

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Contact Us

📧 Public Contact email
superfab@rhul.ac.uk
Host Organisation
Royal Holloway, University of London
🏢 Address

Egham, surrey
Greater London
TW20 0EX
United Kingdom

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